Caple CM105 Handbücher

Caple CM105 Installationshandbuch (300 Seiten)

Marke: Caple | Kategorie: Mikrowellen | Größe: 5.61 MB |

Englisch

Inhaltsverzeichnis

TS12 Series

1

TS8 Series

1

TS6 Series

1

R&D Series

1

Preface

3

Cautions and warnings

4

Table of Contents

5

Introduction

6

1 Introduction

7

2 Schedules

9

Switch furnace off

9

3 Procedures

11

Furnace, tube and

13

7.4 Placing the loadstation

16

7.5 Placing the gascabinet

17

7.6 Placing the tubes

18

7.7 Loader rail alignment

19

7.8 Paddle alignment

20

7.9 Wafer load set up

21

Placing the power

23

Power cabinet

25

Hookup Furnace –

29

Furnace –

33

Gascabinet

33

Facilities

39

7.3 Connecting the gases

42

7.5 Connecting the power

44

7.6 Connecting the exhaust

45

THESE PUMP FACILITIES ARE

46

Initial System

47

Inspection

47

Power Cabinet

49

Furnace Start-up

51

Burn-In

59

ambient temperature;

63

(Pre)cleaning a

65

Conservative

68

Aggressive

68

(Re)placement

69

7.3 LPCVD process tube

72

Functional

73

7.3 Mounted items check

75

7.4 Furnace check

76

Gas Gas

77

7.6 Tube 1 check

79

7.7 Tube 2 check

81

7.8 Tube 3 check

83

7.9 Tube 4 check

85

7.11 Boatloader check

88

Gas lines leak check

89

7.3.1 Preparation

92

LPCVD injector

95

7.4 Used injector removal

99

Exjector

101

(re)placement

101

7 Procedure

103

7.5 Used exjector removal

107

B&R servo driver

109

7.2 Servo driver set-up

111

JP3 End-switch mode

112

JP4 JP5 Motor Direction

112

7.2.2 Clearing memory

113

7.3.1 Verify Boat Length

113

7.3.2 Find Home position

113

7.3.3 Finding End position

113

Boat Fused

114

7.4 Servo driver status

115

Adjustment of

117

7.2 Mounting and adjustment

119

7.2.3 Unmounting a paddle

120

Setup of a

123

Softcontact Loader

123

Set-up of LPCVD

127

7.2.1 Mounting the paddle

130

Tempress

132

7.3.1 Mounting the twinrods

133

SoftContact Loader

137

Head assembly

137

7.3 Actual setup

140

(10mm position)

143

DOWN (0mm/min osc.speed)

143

0 tilt (level)

143

Touchscreen

147

7.1.3 Mount and calibrate

149

Pressure control

151

Rear exhaust

155

Calibration of a

159

7 Procedure Procedure

161

7.2.2 Push-force

162

7.3 Reset

163

Soft Contact Loader

165

Loader drive unit

168

7.3.1 Hardware reset

169

7.3.2 Software reset

169

Set-up of a Tempress

171

7.3 External torch startup

176

Pump capacity check

185

Manual Profiling

189

Spike Value

191

Power Output

191

Wait for temperature

191

Thermocouples (TCs)

192

7.4 Manual profiling run

193

Automatic Profiling

195

Process startup and

199

7.1 Introduction

200

7.2 Prerequisites

200

7.3 Further fine-tuning

201

7.4.1 Touch screen

202

7.4.2 TSC-2

203

Process qualification

205

7.1.4 Color charts

207

Finding the flatzone

211

7.3.1 Center spike distance

213

7.3.3 Flatzone marking

213

7.4.2 Center spike distance

214

7.4.4 Flatzone marking

214

OEM component

215

7.2 OEM components

216

Scavenger Flowring

219

Assy TS8

219

Caution

221

B&R Servo CPU

231

Heating element

233

Heat exchanger

239

Mainswitch reset

241

7.2 Reset procedure

242

Loadstation

243

Fan cleaning

243

SCR replacement

247

Quartz bubbler

249

7.2.8 Leak check

265

Cleaning intervals

269

Airflow check

273

Variac adjustment

277

DPC calibration

279

DTC calibration

283

Prefilter

289

HEPA filter

293

EMO circuit

295

Earth leakage

297

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